Plasma Nano Low-pressure plasma
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Plasma Nano Low-pressure plasma ระบบนาโนพลาสม่า
The Nano plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Nano plasma systems. Nano plasma systems are primarily used in the following sectors:
ระบบนาโนพลาสม่า สามารถนำมาใช้ในรูปแบบต่างๆ ในลักษณะโมดูลาร์ ระบบนาโนพลาสม่า จะใช้ ใน ภาคส่วนต่อไปนี้ เป็นหลัก :
- Analytics
- archaeology
- automotive
- research and development departments
- semiconductor technology
- small-series manufacture
- plastics technology
- medical engineering,
- micro-system engineering
- sensory technology
- sterilising
- textile technology
Technical Data
Cabinets
Tabel top
Width approx. 560 mm (22“)
Depth approx. 600 mm (23.6“)
(570 – 750 mm (22.4“ – 29.5“) incl. plugs)
Height approx. 600 – 860 mm (23.6“ – 33.9“)
Stand alone
Width approx. 600 mm (23.6“)
(750 mm (29.5“) incl. plugs)
Depth approx. 800 mm (31.5“)
Height approx. 1700 mm (66.9“)
Chamber volume
Approx. 18 – 36 Litres
Power supply
230 V AC for tabel top system
400 V AC/ 3 phases for stand alone system
Vacuum chambers
Stainless steel
Round with cover
Ø 267 mm (10.5“), L 420 mm (16.5“) or 600 mm (23.6“)
Rectangular with hinged door
W 240 mm (9.4“), H 240 mm (9.4“), D 420 mm (16.5“)
or 600 mm (23.6“)
Aluminium
Round with hinged door
Ø 240 mm (9.4“) x 240 mm (9.4“), L 420 mm (16.5“) or
600 mm (23.6“)
Quarzglas (UHP)
Round with cover or with hinged door
Ø 230 mm (9.4“), L 400 mm (15.7“) or 600 mm (23.6“)
Borosilikatglas (UHP)
Round with cover or with hinged door
Ø 230 mm (9.4“), L 400 mm (15.7“) or 600 mm (23.6“))
Control
Semi Automatic
PCCE-control (Microsoft Windows CE)
PC-control (Microsoft Windows POS Ready 2009)
Rotary switch control
Generator Frequency
100 kHz Power 500 W
80 kHz Power 1000 W
13,56 MHz Power 0 – 100 W; 0 – 300 W
2,45 GHz Power 0 – 600 W
All generators are continuously adjustable
from 0 – 100 %